Planar interdigitated electrolyte - conductivity sensors on an insulating substrate covered with Ta 2 O 5
نویسندگان
چکیده
Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrodesubstrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten. © 1997 Elsevier Science S.A.
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